Complementary metal oxide semiconductor device 互补金属氧化物半导体器件
Study of the metal oxide semiconductor thin film optical waveguide are focused on optical communications and the development of integrated optical device at home and abroad, However, the application of NiO film in OWG sensors is rare, especially for VOC gas detection. 国内外对半导体金属氧化物薄膜光波导的研究主要集中于光通讯和集成光学器件的研制,而对光学传感性能的研究很少,尤其是金属氧化物薄膜光波导气敏元件。